%0 Journal Article
%T Chemical Mechanical Polishing of GaN
%A Hayashi, S.
%A Koga, T.
%A Goorsky, M. S.
%J Journal of the Electrochemical Society
%V 155
%N 2
%P H113-H116
%@ 0013-4651
%D 2007-12-12
%~ DeepDyve