%0 Journal Article
%T Advances in resists for 157-nm microlithography
%A Trinque, Brian C.
%A Zimmerman, Paul
%A Willson, C. Grant
%J Proceedings of SPIE
%V 4690
%N 1
%P 58-68
%@ 0277-786X
%D 2002-07-15
%I SPIE
%~ DeepDyve