%0 Journal Article
%T Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications
%A Gikunda, Millicent N.
%A Harerimana, Ferdinand
%A Mangum, James M.
%A Rahman, Sumaya
%A Thompson, Joshua P.
%A Harris, Charles Thomas
%A Churchill, Hugh O. H.
%A Thibado, Paul M.
%J Membranes
%V 12
%N 5
%@ 2077-0375
%D 2022-05-19
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve