%0 Journal Article
%T Oxygen Plasma Treatment to Enable Indium Oxide MESFET Devices
%A Schöppach, Fabian
%A Splith, Daniel
%A von Wenckstern, Holger
%A Grundmann, Marius
%J Advanced Electronic Materials
%V 9
%N 11
%D 2023-11-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve