%0 Journal Article
%T Control of proximity effects on CD uniformity through the use of process parameters derived from a statistically designed experiment
%A Christensen, Lorna D.
%J Proceedings of SPIE
%V 1463
%N 1
%P 504-514
%@ 0277-786X
%D 1991-07-01
%I SPIE
%~ DeepDyve