%0 Journal Article
%T A scandium doped aluminum nitride thin film bulk acoustic resonator
%A Gao, Chao
%A Wang, Yaxin
%A Cai, Yao
%A Lin, Binghui
%A Zou, Yang
%A Xu, Qinwen
%A Yang, Tingting
%A Liu, Wenjuan
%A Liu, Yan
%A Guo, Shishang
%A Sun, Chengliang
%J Journal of Micromechanics and Microengineering
%V 34
%N 8
%P 8
%@ 0960-1317
%D 2024-08-01
%I IOP Publishing
%~ DeepDyve