%0 Journal Article
%T Wall Temperature Dependence of Boronization Using Decaborane and Diborane
%A Yamage, Masashi
%A Ejima, Takeshi
%A Saidoh, Masahiro
%A Ogiwara, Norio
%A Hideo Sugai 
 , Hideo Sugai
%J Japanese Journal of Applied Physics
%V 32
%N 9R
%@ 0021-4922
%D 1993-09-01
%~ DeepDyve