%0 Journal Article
%T Proximity Gettering Design of Hydrocarbon–Molecular–Ion–Implanted Silicon Wafers Using Dark Current Spectroscopy for CMOS Image Sensors
%A Kurita, Kazunari
%A Kadono, Takeshi
%A Shigematsu, Satoshi
%A Hirose, Ryo
%A Okuyama, Ryosuke
%A Onaka-Masada, Ayumi
%A Okuda, Hidehiko
%A Koga, Yoshihiro
%J Sensors
%V 19
%N 9
%@ 1424-8220
%D 2019-05-04
%I MDPI
%~ DeepDyve