%0 Journal Article
%T Interaction Between Triblock Copolymer Surfactant and Low- κ  Dielectric Surfaces Relevant to CMP
%A Buthker, Joseph W.
%A Keleher, Jason J.
%A Gewirth, Andrew A.
%J Journal of the Electrochemical Society
%V 157
%N 12
%P G262-G268
%@ 0013-4651
%D 2010-10-21
%~ DeepDyve