%0 Journal Article %T Observation of dislocations and microplasma sites in semiconductors by direct correlations of STEBIC, STEM and ELS %A Fathy, D. %A Sparrow, T. G. %A Valdrè, U. %J Journal of Microscopy %V 118 %N 3 %P 263-273 %@ 0022-2720 %D 1980-03-01 %I Wiley Subscription Services, Inc., A Wiley Company %~ DeepDyve