%0 Journal Article %T Experimental verification of super-resolution optical inspection for semiconductor defect by using standing wave illumination shift %A Usuki, S. %A Nishioka, H. %A Takahashi, S. %A Takamasu, K. %J The International Journal of Advanced Manufacturing Technology %V 46 %N 12 %P 863-875 %@ 0268-3768 %D 2009-01-13 %I Springer-Verlag %~ DeepDyve