%0 Journal Article
%T Technology review and assessment of nanoimprint lithography for semiconductor and patterned media manufacturing
%A Malloy, Matt
%A Litt, Lloyd C.
%J Journal of Micro/Nanolithography, MEMS and MOEMS
%V 10
%N 3
%P 032001-032001-13
%@ 1932-5150
%D 2011-07-01
%I SPIE
%~ DeepDyve