%0 Journal Article
%T Closing the gap for EUV mask repair
%A Bret, T.
%A Jonckheere, R.
%A Van den Heuvel, D.
%A Baur, C.
%A Waiblinger, M.
%A Baralia, G.
%J Proceedings of SPIE
%V 8322
%N 1
%P 83220C-83220C-9
%@ 0277-786X
%D 2012-02-13
%I SPIE
%~ DeepDyve