%0 Journal Article
%T Multilayer Structures and Equipment for Manufacturing Them
%A Sobolev, Ya. A.
%A Savinkova, K. Ya.
%J Journal of Machinery Manufacture and Reliability
%V 50
%N Suppl 1
%P S67-S73
%@ 1052-6188
%D 2021-12-01
%I Pleiades Publishing
%~ DeepDyve