%0 Journal Article
%T Research on high precision and large range automatic focusing method for digital lithography
%A Liu, Yue
%A Luo, Ningning
%A Chen, Zhangrui
%A Deng, Shuai
%A Deng, Jiaqing
%J Proceedings of SPIE
%V 13104
%P 131041N-131041N-13
%@ 0277-786X
%D 2024-03-18
%I SPIE
%~ DeepDyve