%0 Journal Article
%T Fabrication of MoSiON halftone masks using ZEP7000 for MEBES 4500
%A Maetoko, Kazuyuki
%A Fukuma, Hitoshi
%A Yoshioka, Nobuyuki
%A Kawada, Susumu
%A Sauer, Charles A.
%J Proceedings of SPIE
%V 3748
%N 1
%P 350-357
%@ 0277-786X
%D 1999-08-25
%I SPIE
%~ DeepDyve