%0 Journal Article
%T Surface morphology of a Cu substrate flattened by a 2″ photoemission‐assisted ion beam source
%A Mizutani, Goro
%J Surface and Interface Analysis
%V 44
%N 6
%P 670-673
%@ 0142-2421
%D 2012-06-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve