%0 Journal Article
%T Development of optical automatic positioning and wafer defect detection system
%A Tien, Chuen-Lin
%A Lai, Qun-Huang
%A Lin, Chern-Sheng
%J Measurement Science and Technology
%V 27
%N 2
%P 9
%@ 0957-0233
%D 2016-02-01
%~ DeepDyve