%0 Journal Article
%T Size Dependence of Quick Cavity Filling Behavior in Ultraviolet Nanoimprint Lithography Using Pentafluoropropane Gas
%A Youn, Sung-Won
%A Hiroshima, Hiroshi
%A Takahashi, Masaharu
%A Maeda, Ryutaro
%J Japanese Journal of Applied Physics
%V 49
%N 6S
%@ 0021-4922
%D 2010-06-01
%~ DeepDyve