%0 Journal Article
%T Novel micro torque measurement method for microdevices
%A Ota, H
%A Ohara, T
%A Karata, Y
%A Nakasima, S
%A Takeda, M
%J Journal of Micromechanics and Microengineering
%V 11
%N 5
%@ 0960-1317
%D 2001-09-01
%~ DeepDyve