%0 Journal Article
%T The endpoint detection technique for deep submicrometer plasma etching
%A Wang, Wei
%A Lan, Zhong-went
%J Proceedings of SPIE
%V 7382
%N 1
%P 738216-738216-5
%@ 0277-786X
%D 2009-07-03
%I SPIE
%~ DeepDyve