%0 Journal Article
%T Gas Phase Chemistry And Transport Phenomena In MOCVD Reactors
%A Jensen, Klavs F.
%A Fotiadis, Dimitrios I.
%A Lee, Peter W.
%A McKenna, Donald R.
%A Moffat, Harry K.
%J Proceedings of SPIE
%V 796
%P 150-160
%@ 0277-786X
%D 1987-04-20
%I SPIE
%~ DeepDyve