%0 Journal Article
%T Multilevel Interconnects For Integrated Circuits With Submicron Design Rules
%A Wilson, S. R.
%A Mattox, R. J.
%A Seeger, J.
%J Proceedings of SPIE
%V 945
%P 9-17
%@ 0277-786X
%D 1988-08-16
%I SPIE
%~ DeepDyve