%0 Journal Article
%T Fabricating a 2D imaging device using aerosol PZT process
%A Wang, Wei-Chih
%A Chen, Peng-Jyun
%A Chiang, Yu-Hsin
%A Chen, Chao-Ting
%A Wu, Wen-Jong
%J Proceedings of SPIE
%V 10544
%P 105440Q-105440Q-7
%@ 0277-786X
%D 2018-02-22
%I SPIE
%~ DeepDyve