%0 Journal Article
%T Holographic femtosecond laser processing system with an adaptive control
%A Hayasaki, Yoshio
%A Hasegawa, Satoshi
%J Proceedings of SPIE
%V 8204
%N 1
%P 82040B-82040B-7
%@ 0277-786X
%D 2011-12-05
%I SPIE
%~ DeepDyve