%0 Journal Article
%T Influence of material and process parameters in the dry-development of positive-tone, polyaldehyde photoresist
%A Kohl, Paul A.
%A Engler, Anthony
%A Tobin, Cassidy
%A Lo, Chi Kin
%J Journal of Materials Research
%V 35
%N 21
%P 2917-2924
%@ 0884-2914
%D 2020-11-01
%I Springer International Publishing
%~ DeepDyve