%0 Journal Article
%T Piezoelectric Microactuator Devices
%A Maeda, R.
%A Tsaur, J.J.
%A Lee, S.H.
%A Ichiki, M.
%J Journal of Electroceramics
%V 12
%N 2
%P 89-100
%@ 1385-3449
%D 2004-09-30
%I Kluwer Academic Publishers
%~ DeepDyve