%0 Journal Article
%T Design and Fabrication of MOS Device Circuits with Reticle-Free Exposure Method
%A Wakasugi, Katsuhiko
%A Wakimoto, Satoshi
%A Nakada, Akira
%A Ohshima, Ichiro
%A Kubota, Hiroshi
%A Nakamura, Kazumitsu
%J Japanese Journal of Applied Physics
%V 44
%N 4S
%@ 0021-4922
%D 2005-04-01
%~ DeepDyve