%0 Journal Article
%T Development and Application of an Abrasive-Free Polishing Solution for Copper
%A Hanazono, Masanobu
%A Amanokura, Jin
%A Kamigata, Yasuo
%J MRS Bulletin
%V 27
%N 10
%P 772-775
%@ 0883-7694
%D 2002-10-01
%I Springer International Publishing
%~ DeepDyve