%0 Journal Article
%T The future of 2D metrology for display manufacturing
%A Sandstrom, Tor
%A Wahlsten, Mikael
%A Park, Youngjin
%J Proceedings of SPIE
%V 10032
%P 1003208-1003208-12
%@ 0277-786X
%D 2016-10-20
%I SPIE
%~ DeepDyve