%0 Journal Article
%T Thick-membrane-operated radio frequency switches with wafer-level package using gold compressive bonding
%A Kim, Jongseok
%A Kwon, Sangwook
%A Ju, Byeongkwon
%J Journal of Micro/Nanolithography, MEMS and MOEMS
%V 8
%N 4
%P 043020-043020-6
%@ 1932-5150
%D 2009-10-01
%I SPIE
%~ DeepDyve