%0 Journal Article
%T Photolithography process optimization: insights into negative tone resists and spray coating
%A Rimböck, Johanna
%A Weinhart, Martin
%A Holzapfel, Jakob
%A Schreiner, Armin
%A Brunnbauer, Matthias
%A Reum, Madison
%J Proceedings of SPIE
%V 13428
%P 134282J-134282J-10
%@ 0277-786X
%D 2025-04-22
%I SPIE
%~ DeepDyve