%0 Journal Article
%T Accurate optical CD profiler based on specialized finite element method
%A Carrero, Jesus
%A Perçin, Gökhan
%J Proceedings of SPIE
%V 8324
%N 1
%P 83240P-83240P-7
%@ 0277-786X
%D 2012-02-13
%I SPIE
%~ DeepDyve