%0 Journal Article
%T Fused silica glass grass: fabrication and utilization
%A Lilienthal, Katharina
%A Stubenrauch, Mike
%A Fischer, Michael
%A Schober, Andreas
%J Journal of Micromechanics and Microengineering
%V 20
%N 2
%P 11
%@ 0960-1317
%D 2010-02-01
%~ DeepDyve