%0 Journal Article
%T Surface improvement investigation of sol–gel SiO2 cladding for waveguide device passivation
%A Ogawa, Satoshi
%A Idris, Ahmad Syahrin
%A Han, Yu
%A Jiang, Haisong
%A Hamamoto, Kiichi
%J Japanese Journal of Applied Physics
%V 58
%N SJ
%P 5
%@ 0021-4922
%D 2019-08-01
%~ DeepDyve