%0 Journal Article
%T A molded surface-micromachining and bulk etching release (MOSBE) fabrication platform on (111) Si for MOEMS
%A Wu, Mingching
%A Fang, Weileun
%J Journal of Micromechanics and Microengineering
%V 16
%N 2
%@ 0960-1317
%D 2006-02-01
%~ DeepDyve