%0 Journal Article
%T In-line schematic failure analysis technique by defect SEM images
%A Okude, Junya
%A Ida, Chihiro
%A Nojima, Kazuhiro
%A Hamaguchi, Akira
%J Proceedings of SPIE
%V 11611
%P 116110M-116110M-8
%@ 0277-786X
%D 2021-02-22
%I SPIE
%~ DeepDyve