%0 Journal Article
%T Polarization-modulation diagnostics of thermal stresses in an integrated pressure transducer
%A Mikhailenko, I. V.
%A Orlov, A. T.
%A Serdega, B. K.
%J "Semiconductors"
%V 51
%N 4
%P 498-502
%@ 1063-7826
%D 2017-04-01
%I Pleiades Publishing
%~ DeepDyve