%0 Journal Article
%T Off-axis illumination of lithography tool
%A Xing, Han
%A Lin, Li
%A Bin, Ma
%J Proceedings of SPIE
%V 9042
%P 90420U-90420U-7
%@ 0277-786X
%D 2013-12-24
%I SPIE
%~ DeepDyve