%0 Journal Article
%T Laser-induced particle removal from silicon wafers
%A Leiderer, Paul
%A Boneberg, Johannes
%A Dobler, V.
%A Chaoui, N.
%A Siegel, Jan
%A Solis, J.
%A Fourrier, T.
%J Proceedings of SPIE
%V 4065
%N 1
%P 249-259
%@ 0277-786X
%D 2000-08-16
%I SPIE
%~ DeepDyve