%0 Journal Article
%T Planar laser-micro machined bulk PZT bimorph For in-plane actuation
%A Nadig, Sachin
%A Ardanuc, Serhan
%A Lal, Amit
%A ,
%J 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy (ISAF/PFM)
%D 2013-07-01
%I IEEE
%~ DeepDyve