%0 Journal Article
%T The dimensional measurement of micro objects using the linear scanning confocal surface shape measurement system
%A Hinago, Tatsuya
%A Ishihara, Mitsuhiro
%A Otani, Yukihiro
%J Proceedings of SPIE
%V 10749
%P 1074905-1074905-9
%@ 0277-786X
%D 2018-08-18
%I SPIE
%~ DeepDyve