%0 Journal Article
%T Imaging Scatterometer for Observing In-Situ Changes to Optical Coatings During Air Annealing
%A Rezac, Michael
%A Martinez, Daniel
%A Gleckl, Amy
%A Smith, Joshua R.
%J Physics
%V 2022
%N 2210
%D 2022-10-06
%~ DeepDyve