%0 Journal Article
%T Improved parameter targeting in 3D-integrated superconducting circuits through a polymer spacer process
%A Norris, Graham J.
%A Michaud, Laurent
%A Pahl, David
%A Kerschbaum, Michael
%A Eichler, Christopher
%A Besse, Jean-Claude
%A Wallraff, Andreas
%J EPJ Quantum Technology
%V 11
%N 1
%@ 2662-4400
%D 2024-12-01
%I Springer Berlin Heidelberg
%~ DeepDyve