%0 Journal Article
%T Implementation of a chemo-epitaxy flow for directed self-assembly on 300-mm wafer processing equipment
%A Delgadillo, Paulina A. Rincon
%A ,
%J Journal of Micro/Nanolithography, MEMS and MOEMS
%V 11
%N 3
%P 031302-031302
%@ 1932-5150
%D 2012-07-01
%I SPIE
%~ DeepDyve