%0 Journal Article
%T Thermocavitation and its application for fabrication of micron-sized holes on metallic and dielectric thin films
%A Ramirez-San-Juan, J. C.
%A Zaca Moran, P.
%A Aboytes-Rodriguez, E.
%J Proceedings of SPIE
%V 7762
%N 1
%P 77621E-77621E-6
%@ 0277-786X
%D 2010-08-17
%I SPIE
%~ DeepDyve