%0 Journal Article
%T Imaging of buried overlay and alignment markers using picosecond acoustic microscopy
%A Mehendale, Manjusha
%A Antonelli, Andy
%A Mair, Robin
%A Mukundhan, Priya
%A Bogdanowicz, Janusz
%A Blanco, Victor
%A Charley, Anne-Laure
%A Leray, Philippe
%J Proceedings of SPIE
%V 12053
%P 1205313-1205313-5
%@ 0277-786X
%D 2022-05-26
%I SPIE
%~ DeepDyve