%0 Journal Article
%T Direct to digital holography for semiconductor wafer defect detection and review
%A Thomas, Jr., C. E.
%A Baylor, Larry R.
%A Burns, Steven W.
%A Chidley, Matt
%A Dai, Long
%A Goddard, Jr., James S.
%A Hickson, Joel D.
%A Hylton, Kathy W.
%A John, George C.
%A Patek, Dave R.
%A Price, John H.
%A Rasmussen, David A.
%A Schaefer, Louis J.
%A Tobin, Jr., Kenneth W.
%A Usry, William R.
%J Proceedings of SPIE
%V 4692
%N 1
%P 180-194
%@ 0277-786X
%D 2002-07-11
%I SPIE
%~ DeepDyve