%0 Journal Article
%T Gas Discharge Device Based on a Planar Magnetron and a Plasma Ion Source
%A Semenov, A. P.
%A Semenova, I. A.
%A Tsyrenov, D. B.-D.
%J Bulletin of the Russian Academy of Sciences Physics
%V 87
%N Suppl 2
%P S281-S287
%@ 1062-8738
%D 2023-12-01
%I Pleiades Publishing
%~ DeepDyve