%0 Journal Article %T Multi-layer far-infrared component technology %A Peale, Robert E. %A Buchwald, Walter R. %A Edwards, Oliver %J Proceedings of SPIE %V 7817 %N 1 %P 78170D-78170D-9 %@ 0277-786X %D 2010-09-02 %I SPIE %~ DeepDyve